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Micromanufacturing and Nanotechnology
von: Nitaigour P. Mahalik
Springer-Verlag, 2006
ISBN: 9783540293392 , 468 Seiten
Format: PDF, Online Lesen
Kopierschutz: Wasserzeichen
Preis: 149,79 EUR
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Preface
8
Contents
11
Authors
21
1 Introduction
24
1.1 Background
24
1.2 Introduction
25
1.2.1 Precision Engineering
25
1.2.2 Micromilling and Microdrilling
26
1.3 Microelectromechanical Systems (MEMS)
28
1.3.1 An Example: Microphenomenon in Electrophotography
29
1.4 Microelectronics Fabrication Methods
30
1.4.1 Bulk Micromachining
31
1.4.2 Surface Micromachining
31
1.5 Microinstrumentation
32
1.6 Micromechatronics
32
1.7 Nanofinishing
33
1.8 Optically Variable Device
33
1.9 MECS
34
1.10 Space Micropropulsion
34
1.11 e-Beam Nanolithography
35
1.12 Nanotechnology
35
1.13 Carbon Nanotubes and Structures
36
1.14 Molecular Logic Gates
37
1.15 Microdevices as Nanolevel Biosensors
38
1.16 Crosslinking in C60 and Derivatisation
39
1.17 Fuel Cell
40
1.18 References
40
2 Principles of MEMS and MOEMS
42
2.1 Introduction
42
2.2 Driving Principles for Actuation
43
2.3 Fabrication Process
44
2.4 Mechanical MEMS
46
2.4.1 Mechanical sensors
46
2.4.2 Accelerometer, Cantilever and Capacitive Measurement
47
2.4.3 Microphone
48
2.4.4 Gyroscope
49
2.4.5 Mechanical Actuators
49
2.5 Thermal MEMS
51
2.5.1 Thermometry
52
2.5.2 Data Storage Applications
53
2.5.3 Microhotplate Gas Sensors
53
2.5.4 Thermoactuators
54
2.6 Magnetic MEMS
54
2.7 MOEMS
58
2.8 Spatial Light Modulator
60
2.9 Digital Micromirror Device
61
2.10 Grating Light Valve (GLV)
63
2.11 References
65
3 Laser Technology in Micromanufacturing
68
3.1. Introduction
68
3.2. Generation of Laser Light
68
3.3 Properties of Laser Light
72
3.3.1 Monochromacity
73
3.3.2 Directionality
73
3.3.3 Brightness
74
3.3.4 Coherence
74
3.3.5 Spatial Profile
74
3.3.6 Temporal Profile
75
3.4 Practical Lasers
75
3.5 Laser Technology in Micromanufacturing
77
3.5.1 Background
77
3.5.2 Absorption and Reflection of Laser Light
77
3.5.3 Application Technology Fundamentals
79
3.6 References
84
4 Soft Geometrical Error Compensation Methods Using Laser Interferometer
86
4.1 Introduction
86
4.2 Overview of Geometrical Error Calibration
87
4.2.1 Error Measurement System
89
4.2.2 Accuracy Assessment
90
4.3 Geometrical Error Compensation Schemes
91
4.3.1 Look-up Table for Geometrical Errors
92
4.3.2 Parametric Model for Geometrical Errors
93
4.4 Experimental Results
96
4.4.1 Error Approximations
97
4.4.2 Linear Errors
97
4.4.3 Straightness Errors
100
4.4.4 Angular Errors
100
4.4.5 Squareness Error
101
4.4.2 Assessment
102
4.5 Conclusions
102
4.6 Reference
104
5 Characterising Etching Processes in Bulk Micromachining
106
5.1 Introduction
106
5.2 Wet Bulk Micromachining (WBM)
106
5.3 Review
107
5.4 Crystallography and its Effects
108
5.4.1 An Example
109
5.5 Silicon as Substrate and Structural Material
110
5.5.1 Silicon as a Substrate
110
5.5.2 Silicon as Structural Material
111
5.5.3 Stress and Strain
111
5.5.4 Thermal Properties of Silicon
115
5.6 Wet Etching Process
115
5.6.1 Isotropic Etchants
116
5.6.2 Reaction Phenomena
116
5.6.3 Isotropic Etch Curves
117
5.6.4 Masking
119
5.6.5 DD Etchants
120
5.7 Anisotropic Etching
120
5.7.1 Anisotropic Etchants
121
5.7.2 Masking for Anisotropic Etchants
121
5.8 Etching Control: The Etch-stop
122
5.8.1 Boron Diffusion Etch-stop
122
5.8.2 Electrochemical Etch-stop
123
5.8.3 Thin Films and SOI Etch-stop
124
5.9 Problems with Etching in Bulk Micromachining
125
5.9.1 RE Consumption
125
5.9.2 Corner Compensation
126
5.10 Conclusions
127
5.11 References
127
6 Features of Surface Micromachining and Wafer Bonding Process
130
6.1 Introduction
130
6.2 Photolithography
131
6.3 Surface Micromachining
134
6.3.1 Bulk versus Surface Micromachining
135
6.4 Characterising the Surface Micromachining Process
136
6.4.1 Isolation Layer
136
6.4.2 Sacrificial Layer
137
6.4.3 Structural Material
137
6.4.4 Selective Etching
138
6.5 Properties
139
6.5.1 Adhesion
140
6.5.2 Stress
141
6.5.3 Stiction
144
6.6 Wafer Bonding
145
6.6.1 Anodic Bonding
146
6.6.2 Fusion Bonding
147
6.7 Summary
148
6.8 References
150
7 Micromanufacturing for Document Security: Optically Variable Devices
154
7.1 Preamble
154
7.2 Introduction
154
7.3 OVD Foil Microstructures
156
7.3.1 The Security Hologram
156
7.3.2 The Kinegram
157
7.3.3 The Catpix Electron Beam Lithography Microstructure
160
7.3.4 Structural Stability
161
7.3.5 The Pixelgram Palette Concept
162
7.3.6 The Exelgram Track based OVD Microstructure
164
7.3.7 Covert Image Micrographic Security Features
167
7.3.8 Kinegram and Exelgram: Comparison
168
7.3.9 Vectorgram Image Multiplexing
168
7.3.10 Interstitial Groove Element Modulation
171
7.4 Generic OVD Microstructures
172
7.4.1 Optically Variable Ink Technology
173
7.4.2 Diffractive Data Foils
174
7.4.3 Biometric OVD Technology
177
7.5 NanoCODES
180
7.5.1 The Micromirror OVD
182
7.5.2 Origination of a Micromirror OVD
183
7.5.3 Summary of Micromirror OVD Optical Effects
187
7.6 Conclusions
189
7.7 References
190
8 Nanofinishing Techniques
194
8.1 Introduction
194
8.2 Traditional Finishing Processes
196
8.2.1 Grinding
196
8.2.2 Lapping
196
8.2.3 Honing
197
8.3 Advanced Finishing Processes (AFPs)
197
8.3.1 Abrasive Flow Machining (AFM)
198
8.3.2 Magnetic Abrasive Finishing (MAF)
201
8.3.3 Magnetorheological Finishing (MRF)
203
8.3.4 Magnetorheological Abrasive Flow Finishing (MRAFF)
206
8.3.5 Magnetic Float Polishing (MFP)
211
8.3.6 Elastic Emission Machining (EEM)
212
8.3.7 Ion Beam Machining (IBM)
213
8.3.8 Chemical Mechanical Polishing (CMP)
215
8.4 References
216
9 Micro and Nanotechnology Applications for Space Micropropulsion
220
9.1 Introduction
220
9.2 Subsystems and Devices for Miniaturised Spacecrafts Micropropulsion
224
9.3 Propulsion Systems
230
9.3.1 Solid Propellant
231
9.3.2 Cold-Gas
231
9.3.3 Colloid Thrusters
231
9.3.4 Warm-Gas
231
9.3.5 Monopropellant and Bipropellant Systems
231
9.3.6 Regenerative-Pressurisation Cycles
232
9.3.7 ADCS
232
9.4 Realisation of a Cold-Gas Microthruster
232
9.4.1 Gas- and Fluid Dynamics
233
9.4.2 Prototyping
234
9.5 Conclusions
240
9.6 References
240
10 Carbon Nanotube Production and Applications: Basis of Nanotechnology
242
10.1 Introduction
242
10.2 Nanotechnology and Carbon Nanotube Promises
242
10.3 Growing Interest in Carbon Nanotube
244
10.4 Structure and Properties of Carbon Nanotubes
246
10.5 Production of Carbon Nanotube
248
10.5.1 Chemical Vapour Deposition
249
10.5.2 Arc Discharge
250
10.5.3 Laser Ablation
251
10.5.4 Mechanisms of Growth
252
10.5.5 Purification of Carbon Nanotube
253
10.6 Applications of Carbon Nanotubes
254
10.6.1 Electrical Transport of Carbon Nanotubes for FET
254
10.6.2 Computers
256
10.6.3 CNT Nanodevices for Biomedical Application
257
10.6.4 X-Ray Equipment
258
10.6.5 CNTs for Nanomechanic Actuator and Artificial Muscles
259
10.6.6 Fuel Cells
260
10.6.7 Membrane Electrode Assembly
261
10.6.8 Mechanical and Electrical Reinforcement of Bipolar Plates with CNTs
262
10.6.9 Hydrogen Storage in CNTs
263
10.7 References
264
11 Carbon based Nanostructures
270
11.1 Introduction
270
11.2 History of Fullerenes
270
11.3 Structure of Carbon Nanotubes (CNTs)
271
11.3.1 Y-shaped
271
11.3.2 Double Helical
275
11.3.3 Bamboo-like Structure
275
11.3.4 Hierarchical Morphology Structure
275
11.3.5 Ring Structured MWCNTs
275
11.3.6 Cone Shape End Caps of MWCNTs
275
11.4 Structure of Fullerenes
276
11.4.1 Structure of C48 Fullerenes
276
11.4.2 Toroidal Fullerenes
276
11.4.3 Structure of C60, C59, C58, C57
276
11.4.4 The Smaller Fullerene C50
277
11.5 Structure of Carbon Nanoballs (CNBs)
279
11.6 Structure of Carbon Nanofibers (CNFs)
280
11.6.1 Hexagonal CNFs
280
11.6.2 Corn-shaped CNFs
280
11.6.3 Helical CNFs
280
11.7 Porous Carbon
281
11.8 Properties of Carbon Nanostructures
282
11.8.1 Molecular Properties
282
11.8.2 Electronic Properties
282
11.8.3 Optical Properties
282
11.8.4 Mechanical Properties
283
11.8.5 Periodic Properties
283
11.9 Synthesis
284
11.9.1 Carbon Nanotubes
284
11.9.2 Fullerenes
285
11.9.3 Nanoballs
286
11.9.4 Nanofibers
286
11.10 Potential Applications of Nanostructures
288
11.10.1 Energy Storage
288
11.10.2 Hydrogen Storage
288
11.10.3 Lithium Intercalation
289
11.10.4 Electrochemical Supercapacitors
290
11.10.5 Molecular Electronics with CNTs
291
11.11 Composite Materials
293
11.12 Summary
294
11.13 References
294
12 Molecular Logic Gates
298
12.1 Introduction
298
12.2 Logic Gates
298
12.3 Fluorescence based Molecular Logic Gates
300
12.4 Combinational Logic Circuits
308
12.5 Reconfigurable Molecular Logic
309
12.6 Absorption based Molecular Logic Gates
310
12.7 Molecular Logic Gates: Electronic Conductance
316
12.8 Conclusions
318
12.9 References
318
13 Nanomechanical Cantilever Devices for Biological Sensors
322
13.1 Introduction
322
13.2 Principles
323
13.3 Static Deformation Approach
324
13.4 Resonance Mode Approach
325
13.5 Heat Detection Approach
328
13.6 Microfabrication
329
13.6.1 Si-based Cantilever
329
13.6.2 Piezoresistive Integrated Cantilever
330
13.6.3 Piezoelectric Integrated Cantilever
331
13.7 Measurement and Readout Technique
332
13.7.1 Optical Method
332
13.7.2 Interferometry
333
13.7.3 Piezoresistive Method
333
13.7.4 Capacitance Method
334
13.7.5 Piezoelectric Method
334
13.8 Biological Sensing
336
13.8.1 DNA Detection
336
13.8.2 Protein Detection
338
13.8.3 Cell Detection
340
13.9 Conclusions
341
13.10 References
342
14 Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication
346
14.1 Introduction
346
14.2 Micro Energy and Chemical Systems
350
14.2.1 Heat and Mass Transfer in MECS Devices
351
14.2.2 Applications of MECS Technology
351
14.3 MECS Fabrication
353
14.3.1 Challenges
353
14.3.2 Feature Sizes
354
14.3.3 Microlamination
355
14.4 Dimensional Control in Microlamination
357
14.4.1 Effects of Patterning on Microchannel Array Performance
358
14.4.2 Theory
359
14.4.3 Microchannel Fabrication
360
14.4.4 Results
361
14.5 Sources of Warpage in Microchannel Arrays
364
14.5.1 Analysis
366
14.5.2 Results
369
14.6 Effects of Registration and Bonding on Microchannel Array Performance
370
14.7 Geometrical Constraints in Microchannel Arrays
371
14.8 Economics of Microlamination
374
14.9 References
375
15 Sculptured Thin Films
380
15.1 Introduction
380
15.2 STF Growth
381
15.2.1 Experimental and Phenomenological
381
15.2.2 Computer Modeling
385
15. 3 Optical Properties
386
15.3.1 Theory
386
15.3.2 Characteristic Behavior
393
15.4 Applications
396
15.4.1 Optical
396
15.4.2 Chemical
398
15.4.3 Electronics
398
15.4.4 Biological
398
15.5 Concluding Remarks
399
15.6 References
400
16 e-Beam Nanolithography Integrated with Nanoassembly: Precision Chemical Engineering
406
16.1 Introduction
406
16.2 Electron-Beam Radiation
407
16.2.1 Polymeric Materials
407
16.2.2 Molecular Materials
408
16.3 Self-Assembled Monolayers
410
16.4 Summary and Outlook
414
16.5 References
415
17 Nanolithography in the Evanescent Near Field
420
17.1 Introduction
420
17.2 Historical Development
421
17.3 Principles of ENFOL
423
17.4 Mask Requirements and Fabrication
424
17.5 Pattern Definition
425
17.5.1 Exposure Conditions
425
17.5.2 Resist Requirements
426
the Diffraction Limit
426
17.6. Pattern Transfer
428
17.6.1 Subtractive Pattern Transfer
428
17.6.2 Additive Pattern Transfer
429
17.7 Simulations
430
17.7.1 Simulation Methods and Models
432
17.7.2 Intensity Distribution
433
17.7.3 Depth of Field (DOF)
434
17.7.4 Exposure Variations due to Edge Enhancements
436
17.8 Nanolithography using Surface Plasmons
437
17.8.1 Evanescent Interferometric Lithography (EIL)
438
17.8.2 Planar Lens Lithography (PLL)
439
17.8.3 Surface Plasmon Enhanced Contact Lithography (SPECL)
442
17.9 Conclusions
444
17.10 References
445
18 Nanotechnology for Fuel Cell Applications
448
18.1 Current State of the Knowledge and Needs
448
18.2 Nanoparticles in Heterogeneous Catalysis
450
18.3 Oxygen Electroreduction Reaction on Carbon-Supported Platinum Catalysts
452
18.4 Carbon Nanotubes as Catalyst Supports
455
18.5 Concluding Remarks
460
18.6 References
461
19 Derivatisation of Carbon Nanotubes with Amines: A Solvent-free Technique
464
19.1 Introduction
464
19.2 Experimental Design
465
19.3 Direct Amidation of Carboxylic Functionalities on Oxidised SWNT Tips
466
19.4 Direct Amine Addition to Closed Caps and Wall Defects of Pristine MWNTs
468
19.5 Conclusions
473
19.6 References
473
20 Chemical Crosslinking in C60 Thin Films
476
20.1 Introduction
476
20.2 Experiment
477
20.2.1 Analytical Instruments
477
20.2.2 Deposition of Fullerene Films
478
20.2.3 Reaction with 1,8-Diaminooctane
478
20.3 Results and Discussion
478
20.3.1 (1,8)-Diaminooctane-derivatised C60 Powder
478
20.3.2 1,8-Diaminooctane-derivatised C60 Films
479
Index
486